Handbook of Humidity Measurement, Volume 3

This useful handbook offers an analysis of humidity-sensitive materials along with fabrication and design challenges that may arise in manufacturing and solutions via available new technology. A guide to sensor selection and an overview of the humidity sensor market concludes the work.

Ghenadii Korotcenkov

Section i Humidity-Sensitive Materials Chapter 1 Polymers .................................................................................................................................................................. 3 Chapter 2 Metal Oxide in Humidity Sensors ......................................................................................................................... 23 Chapter 3 Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35 Chapter 4 Carbon-Based Materials ........................................................................................................................................ 51 Chapter 5 Semiconductor-Based Humidity Sensors .............................................................................................................. 91 Chapter 6 Porous Silicon ...................................................................................................................................................... 109 Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139 Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151 Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163 Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171 Chapter 11 Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187 Chapter 12 Supramolecular Materials .................................................................................................................................. 209 Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223 Section ii Sensor technologies and Related Materials Chapter 14 Substrates and Electrodes in Humidity Sensors ................................................................................................ 229 Chapter 15 Fundamentals of Microfabrication Technologies............................................................................................... Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263 Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271 Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281 Chapter 19 Polymer Technologies ........................................................................................................................................ 305 Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339 Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445 Chapter 28 Market of Electronic Humidity Sensors ............................................................................................................ 453