MEMS

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.

Introduction. Materials for Microelectromechanical Systems. MEMS Fabrication. LIGA and Micromolding. X-Ray Based Fabrication. EFAB Technology and Application. Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization and Reliability. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide. Polymer Microsystems: Materials and Fabrications. Optical Diagnostics to Investigate the Entrance Length in Microchannels. Microfabricated Chemical Sensors for Aerospace Applications. Packaging of Harsh Environment MEMS Devices.