Microelectronics to Nanoelectronics

This book gives a comprehensive cross-section of promising MEMS and nanotechnologies that are important to the future growth of the electronics industry. International experts in academia and leading industrial institutions present the most recent scientific developments. They highlight new technologies that have successfully transitioned from the laboratory to the marketplace as well as technologies that have near-term market applications in electronics, materials, and optics. The book also provides up-to-date references on the latest advances in this evolving field.

Dr. Anupama B. Kaul obtained her MS and Ph.D degrees in Materials Science and Engineering from the University of California-Berkeley with minors in Electrical Engineering and Physics. She received her BS degrees with honors in Physics, as well as Engineering Physics. Presently, she is a Program Director at the National Science Foundation in the Engineering Directorate, where she is serving as an IPA from the Jet Propulsion Laboratory (JPL) California Institute of Technology (Caltech). Prior to joining JPL - Caltech, Dr. Kaul held industrial research positions at Motorola Labs and the R&D Division of Hewlett-Packard Company, where she worked on RF micro-electro-mechanical-systems (MEMS) components for wireless applications, and surface micro-machined ink-jet print heads, respectively. Dr. Kaul has given numerous invited and keynote talks on nanotechnology-related topics at international conferences and meetings, and she is active in chairing conferences for the IEEE, MRS, SPIE and NSTI, and other professional societies. Dr. Kaul is a Senior Member of the IEEE and has also been selected to participate in the U.S. Frontiers of Engineering Symposium organized by the National Academy of Engineering.

Scaling and Radiation Effects in Silicon Transistors. Hewlett-Packard's MEMS Technology: Thermal Inkjet Printing and Beyond. Silicon MEMS Resonators for Timing Applications. Nanoscale Electromechanical Devices Enabled by Nanowire Structures. Silicon Etching and Etch Techniques for NEMs and MEMs. Learning from Biology: Viral-Templated Materials and Devices. Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems. Heterogeneous Integration of Carbon Nanotubes on Complementary Metal Oxide Semiconductor Circuitry and Sensing Applications. NEMS-Based Ultra Energy-Efficient Digital ICs: Materials, Device Architectures, Logic Implementation, and Manufacturability. Carbon Nanotube Y-Junctions. Nanoscale Effects in Multiphase Flows and Heat Transfer. Nanoengineered Material Applications in Electronics, Biology, and Energy Harnessing.