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Advancements in micro/nanooptical fabrication technologies have led to the next generation of optical components. Microoptics and Nanooptics Fabrication explores this vital relationship, detailing fabrication processes as they affect a micro or nanooptical component's intended performance. Various contributors examine topics such as surface relief diffractive optical elements, solar cell microoptics, gray-scale refractive microoptics, digital and analog mask properties, microoptics replication, ion exchange optics, semiconductor waveguides, optical MEMS, and as two- and three-dimensional photonic crystals.
Shanalyn Kemme joined Sandia Laboratories in 1998. She received her master's degree in physics in 1985 from Kansas State University. She worked for a defense contractor for eight years before going back to school at the Optical Sciences Center at the University of Arizona, where she obtained her Ph.D. in optical sciences in 1998.
Fabricating Surface-Relief Diffractive Optical Elements. Fabrication of Microoptics with Plasma Etching Techniques. Analog Lithography with Phase-Grating Masks. Electron Beam Lithography for the Nanofabrication of Optical Devices. Nanoimprint Lithography and Device Applications. Design and Fabrication of Planar Photonic Crystals. Fabrication of 3D Photonic Crystals: Molded Tungsten Approach.